| 摘要 |
Disclosed is a cathode electrode plate for a plasma chamber. The cathode electrode plate for the plasma chamber according to one embodiment of the present invention adheres to a cooling plate of the plasma chamber, and is the cathode electrode plate in which multiple combining grooves are formed along a circumferential direction. The cathode electrode plate comprises: an equally-spaced section in which the combing grooves are disposed at equally spaced intervals, an unequally-spaced sections in which the combining grooves are disposed at unequally spaced intervals adjacent to the equally-spaced section, and a hole and a gas barrel having a plurality of concentric circles on the basis of the center, wherein the plurality of concentric circles is opened. |
