发明名称 |
METHOD AND DEVICE FOR LASER MICROMACHINING |
摘要 |
The invention, according to an aspect thereof, relates to a device (60) for laser micromachining a sample made of a given material, which includes a focusing module enabling a nondiffracting beam to be generated from a given incident beam, said nondiffracting beam being focused along a focusing cylinder that is oriented generally along the optical axis of the focusing module, means (601) for transmitting at least one first light pulse (11) suitable for generating, after said focusing module focuses in the sample, a plasma of free charges by multiphotonic absorption in a volume of the sample located on the side surface of said focusing cylinder. |
申请公布号 |
WO2015055779(A1) |
申请公布日期 |
2015.04.23 |
申请号 |
WO2014EP72255 |
申请日期 |
2014.10.16 |
申请人 |
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE - CNRS |
发明人 |
COURVOISIER, FRANÇOIS;LACOURT, PIERRE-AMBROISE;COUAIRON, ARNAUD |
分类号 |
B23K26/06;B23K26/073;B23K26/38;B23K26/40 |
主分类号 |
B23K26/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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