VIBRATION ELEMENT, SUPPORT STRUCTURE OF THE SAME AND VIBRATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a vibration gyro element with improved impact resistance.SOLUTION: A beam 20b extends from an outer edge of a base portion 10 between a coupling arms 13b and a detecting vibration arm 11a. The beam 20b comprises a first folding back portion 20c including: a first extension portion 20b1 extending from the base portion 10 along an X axis in a plus direction of the X axis; a second extension portion 20b2 extending from a leading end portion of the first extension portion 20b1 along a Y axis in a plus direction of a Y axis; and a third extension portion 20b3 extending from a leading end portion of the second extension portion 20b2 along the X axis in a minus direction of the X axis. The first extension portion 20b1 and the third extension portion 20b3 are arranged at an interval W1 where a first irregular-shaped portion H1 generated inside a corner portion 20c1 formed by the first extension portion 20b1 and the second extension portion 20b2 of the first folding back portion 20c, and a second irregular-shaped portion H2 generated inside a corner portion 20c2 formed by the second extension portion 20b2 and the third extension portion 20b3 are not brought into contact with each other as viewed in a plan view.