METHOD FOR VERIFYING MANUFACTURING MEASUREMENTS USED FOR VIRTUAL ANALYSIS INSTRUMENT IN A FACTORY

摘要

A method for verifying manufacturing measurements used for predicting outputs by virtual analysis instruments in a factory, which has production equipment and a virtual analysis instrument, comprises steps: using model-building data of the virtual analysis instrument to build a verification model via a PCA method, and obtaining control limits of the verification model; inputting a plurality of pre-verification measurements into the verification model to calculate verification statistic, and using the verification statistic and the control limits to exclude at least one failure value from the pre-verification measurements to generate the validated measurements; and finally inputting the validated measurements into the virtual analysis instrument for predicting the outputs to determine that the manufacturing measurements are valid, and using the production equipment to undertake production according to predictions of the virtual analysis instrument. Thereby, the virtual analysis instrument can be prevented from predicting erroneous output results due to invalid input.

主权项

1. A method for verifying manufacturing measurements used for predicting outputs by a virtual analysis instrument in a factory, the factory comprising production equipment and the virtual analysis instrument where the manufacturing measurements are input, the method comprising the steps of:
Step 1: using model-building data of the virtual analysis instrument to build a verification model via a Principal Component Analysis (PCA) method; Step 2: using the PCA method to obtain verification-model measurements of the verification model, wherein the verification-model measurements include control limits; Step 3: inputting a plurality of pre-verification measurements into the verification model to calculate verification statistic, and using the verification statistic and the control limits to exclude at least one failure value from the pre-verification measurements to generate validated measurements for the virtual analysis instrument; Step 4: inputting the validated measurements into the virtual analysis instrument for predicting the outputs; and Step 5: using the production equipment to undertake production according to predictions of the virtual analysis instrument.