| 摘要 |
The purpose of the present invention is to improve the reliability of leak testing during leak testing by an accumulation method, by permitting conclusive detection of an accumulated inspection gas, as well as reducing background and impurity gases. At least an openable/closeable part (29) of a capsule (20) is accommodated within a chamber (10) of the leak testing device (1). A test specimen (9) is accommodated within the capsule (20). The gas within the chamber (10) is evacuated to a vacuum state by a vacuum pump (31). An inspection gas contained in this gas is detected by a detection means (2). The capsule (20) is sealed continuously for an accumulation time Ta, and thereafter the capsule (20) is opened, and leakage is evaluated on the basis of information detected by the detection means (2) subsequent to opening. |
