| 摘要 |
PROBLEM TO BE SOLVED: To provide a chemical container replacement device capable of replacing a chemical container without requiring manual work, reducing a burden on an operator, and suppressing deterioration and particle contamination of a chemical liquid.SOLUTION: A plurality of container holders 2 on which a chemical container 3 is positioned are arranged along the orbit including the replacement position P13 of the chemical container 3. The container holder 2 on which the used chemical container is mounted is moved to the replacement position P13 along the orbit by a driving mechanism and the used chemical container in the replacement position P13 is replaced with a new chemical container by using a transfer mechanism. Furthermore, an area of arranging and replacing the chemical container 3 is made to be a closed area by also performing the attaching and detaching of a chemical liquid supply passage with a nozzle attaching/detaching mechanism. |
