发明名称 CUTTING DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To provide a cutting device which prevents chips from adhering to and remaining in a workpiece and achieves high accuracy cutting.SOLUTION: A cutting device (2) includes: holding means (20) which holds a workpiece (11); a cutting blade (40) which cuts the workpiece held by the holding means; a spindle unit including a spindle (38) which rotatably supports the cutting blade; and a blade cover (46) which covers the cutting blade, has an opening (46b), from which a tip of the cutting blade protrudes, at a bottom part, and is attached to the spindle unit. The cutting device (2) includes blade cover cooling means which cools the blade cover.</p>
申请公布号 JP2015079792(A) 申请公布日期 2015.04.23
申请号 JP20130214765 申请日期 2013.10.15
申请人 DISCO ABRASIVE SYST LTD 发明人 MATSUMOTO SACHIKO
分类号 H01L21/301;B24B27/06;B24B55/02;B24B55/04 主分类号 H01L21/301
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