PROBING DEVICE FOR ELECTRONIC DEVICE AND PROBING METHOD

摘要

To provide a probing device and a probing method for an electronic device capable of confirming whether or not an electrical inspection has been executed appropriately, with an electrode pad being made in contact with a probe with a predetermined pressure, by utilizing a change in external shapes to be formed on the electrode pad when the probe and the electrode pad are pressed onto each other. The device is provided with a microscope 23 for image-capturing the electrode pad and for outputting the external shape of the electrode pad as image data, and a control unit 27 which stores image data of an external shape of the electrode pad prior to the contact with a probe 102, and compares the image data of the external shape thus stored with image data thereof after the contact obtained from the microscope 23, or compares the registered frame of the electrode pad with the outer periphery of the electrode pad detected at the time of inspecting a needle trace, so that the quality of the contact between the electrode pad and the probe 102 is determined.

主权项

1. A probing device for carrying out an electrical inspection by making an electrode pad of an electronic device on a substrate in contact with a probe with a predetermined pressure, comprising:
a microscope for capturing an image of the electrode pad so as to output an external shape of the electrode pad as image data; and a control unit that stores the image data of the external shape of the electrode pad prior to the contact with the probe, and compares the image data of the external shape of the electrode pad thus stored or the external shape with image data of the external shape after the contact obtained by the microscope so that the quality of the contact between the electrode pad and the probe is determined.