IMPRINTING APPARATUS AND METHOD FOR IMPRINTING

摘要

A micro-contact imprinting apparatus for transferring patterns of a stamp to a substrate.

主权项

1. A micro-contact imprinting apparatus for transferring patterns of a stamp to a substrate, comprising:
an enclosure dividable into a first chamber and a second chamber by the stamp, the first chamber and the second chamber being air-tightly isolatable with each other by the stamp, wherein the substrate is arranged in the second chamber; and an air-pressure device configured to be fluidly connected with the first chamber and the second chamber to generate air-pressure differences between the first chamber and the second chamber, such that the generated air-pressure differences push the stamp to move and contact with the substrate so as to enable the patterns to be transferred from the stamp to the substrate when the stamp contacts the substrate.