| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas barrier film improved in adhesiveness, gas barrier properties and durability, which are insufficient by conventional systems and configurations.SOLUTION: A gas barrier film has an adhesion layer of an arithmetic average roughness (Ra) of 3 nm or smaller and a thickness of 10-1,000 nm, a surface control layer covering the surface of the adhesion layer with OH groups, a ceramic film formed by an atomic layer deposition method in a reduced-pressure atmosphere and a protective layer of a thickness of 10-1,000 nm containing a metal alkoxide or its hydrolysate, on at least one side of a substrate composed of a polymer film. |
