| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a workpiece holding mechanism that causes no variation in the height of the upper surface of a chuck table before and after attaching the chuck table with respect to the chuck table base.SOLUTION: A workpiece holding mechanism 10 comprises a chuck table 11 for holding a workpiece W and a chuck table base 12 for holding the chuck table 11 on a surface 12a, wherein a positioning part 120 for positioning a position where the chuck table 11 is fixed on the chuck table base 12 is disposed. Since an engaging recess 116 in which a positioning pin 121 engages is formed in a base 113 of a frame body 112, the chuck table can be always mounted in a predetermined direction on the chuck table base 12 and there is no variation in the height of the upper surface of the chuck table 11 before and after attaching the chuck table 11 with respect to the chuck table base 12, thereby the workpiece W can be machined with high accuracy.</p> |
