| 摘要 |
<p>PROBLEM TO BE SOLVED: To detect whether a frame has been clamped or not without being affected by spray of a cutting fluid and contamination, which occur during cutting with use of the cutting fluid, in a frame clamp device for clamping the frame supporting a workpiece.SOLUTION: A frame clamp device 6 for fixing an annular frame which is disposed on an outer periphery of a chuck table to support a workpiece, includes: a retaining member 63 to be located in a clamp position or a release position; and detection means 64. When the retaining member 63 is located in the clamp position, a pressure value becomes equal to or lower than a prescribed value because a vacuum hole 640a of a vacuum pad 640 is closed by contact with the retaining member 63 to generate a negative pressure, thereby the detection means 64 detects that the retaining member 63 is located in the clamp position. Since a cutting fluid and contamination are sucked from the vacuum hole 640a, the detection means 64 can be prevented from becoming inoperative due to deposition of them.</p> |
