DEPOSITION DATA PROCESSING APPARATUS, AND APPARATUS AND METHOD FOR MANUFACTURING ORGANIC EL DEVICE

摘要

Provided are a deposition data processing apparatus, an apparatus and a method for manufacturing an organic EL device, which make it possible to check deposition states of constituent layers of each of organic EL elements that are continuously formed on a substrate being conveyed. The deposition data processing apparatus includes a scanning section configured to scan at least two of a plurality of constituent layers that constitute each of the organic EL elements; and a processor configured to accumulate data of the constituent layers scanned by the scanning section at a specific position in a longitudinal direction of the substrate as data of a specific one of the organic EL elements.

主权项

1. A deposition data processing apparatus configured to process deposition data of a plurality of organic EL elements that are formed in line in a longitudinal direction of a strip-shaped substrate being conveyed by depositing evaporation materials on the substrate, the apparatus comprising:
a scanning section configured to scan at least two of a plurality of constituent layers that constitute each of the organic EL elements; and a processor configured to accumulate data of the respective constituent layers scanned by the scanning section at a specific position in the longitudinal direction of the substrate, as data of a specific one of the organic EL elements.