发明名称 |
METHOD OF FABRICATING WAVELENGTH CONVERSION DEVICE |
摘要 |
Disclosed is a method for fabricating a wavelength conversion device that is capable of suppressing unintended and random polarization reversal due to heating thereby achieving higher wavelength conversion efficiency. The method includes: forming an insulating layer on one place of a crystal substrate naturally and uniformly polarized in a thickness direction; forming an insulating layer pattern with line-and-space by photolithography; then supplying conductive fluid to both planes of the crystal substrate to apply voltage to the crystal substrate, thereby a wavelength conversion device that is periodically polarization-reversed is fabricated. When temperature of the crystal substrate decreases after heating, an ionizer supplies ions to a surface of the crystal substrate, negative ions collect on +z plane, and positive ion collect on −z plane, thereby unintended and random polarization reversal is suppressed. |
申请公布号 |
US2015109660(A1) |
申请公布日期 |
2015.04.23 |
申请号 |
US201414512627 |
申请日期 |
2014.10.13 |
申请人 |
USHIO DENKI KABUSHIKI KAISHA |
发明人 |
OTA Keisuke |
分类号 |
G02F1/35;C30B33/02 |
主分类号 |
G02F1/35 |
代理机构 |
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代理人 |
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主权项 |
1. A method of fabricating a wavelength conversion device, the device being fabricated from a crystal substrate and having a structure that is periodically polarization-reversed in the direction perpendicular to a thickness direction of the crystal substrate formed from a ferroelectric crystal demonstrating a non-linear optical effect, the method comprising:
heating the crystal substrate; and removing electricity on a surface of the crystal substrate when temperature of the crystal substrate being changing due to the heating. |
地址 |
Tokyo JP |