ELECTRODE HEATING POLE AND PROCESSING TECHNIQUE THEREOF

摘要

An electrode heating pole and a processing technique thereof. The electrode heating pole comprises a substrate, a heating pole layer, an isolation layer and an electrode layer. The heating pole layer covers the substrate by means of deposition. A silicon dioxide isolation layer is further deposited on the heating pole layer. A metal electrode layer covers the heating pole layer and the isolation layer by means of deposition. The electrode layer at an upper portion of the isolation layer is removed through etching. According to the present invention, the principle that an etching rate of silicon dioxide and an etching rate of metal have a large difference is used to add a silicon dioxide isolation layer between the electrode layer and the heating pole layer, which achieves a good protection effect during etching of the electrode layer; the heating pole layer is effectively prevented from being etched; completeness of the heating pole layer is ensured; a difficulty in controlling precision of an etching time is reduced greatly; and heating pole performance of a product is improved.