| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a probing apparatus for an electronic device capable of recognizing whether an electrical inspection is properly executed by bringing an electrode pad into a probe with predetermined pressure while utilizing a change of an external shape formed in the electrode pad when the probe and the electrode pad are pressed, and a probing method.SOLUTION: The probing apparatus includes: a microscope 23 which images the electrode pad and outputs the external shape of the electrode pad as image data; and a control part 27 which stores the image data of the external shape of the electrode pad before contact with a probe 102, compares the stored image data of the external shape with image data after contact obtained from the microscope 23 or compares an outer periphery of the electrode pad in an electrode pad registration field registration frame with that of the electrode pad detected in a needle mark inspection and determines the propriety of contact between the electrode pad and the probe 102.</p> |
