| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a spinner device that can reduce labor and time for adjusting a holding position and cost.SOLUTION: A spinner device 1 comprises: edge clamps 10 that hold at least three points of an outer peripheral edge of a wafer; rotating means 13 that supports and rotates the edge clamps 10; a surface-cleaning liquid supply nozzle 20 that supplies cleaning liquid to the surface of the wafer held by the edge clamps 10; and a backside-cleaning liquid supply nozzle 22 that supplies cleaning liquid to the backside of the wafer held by the edge clamps 10. The edge clamps 10 are constituted including movable clamps 11 that hold one point of the outer peripheral edge of the wafer and fixing parts 12 that hold two points of the outer peripheral edge of the wafer, so that the center of the wafer can be easily matched with the center of a clamp base 2. Further the edge clamps 10 are cheaper than conventional edge clamps comprising a plurality of movable clamps.</p> |
