| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a negative pressure adjustment unit capable of achieving both fine negative pressure adjustment and negative pressure adjustment of a wide range.SOLUTION: A negative pressure adjustment unit 21 of the present invention has a liquid chamber container 16 containing a first liquid chamber 24, a second liquid chamber 29, and a liquid chamber connection channel 25 for connecting the first liquid chamber 24 with the second liquid chamber 29. Liquid flows into the first liquid chamber 24. The liquid flows out from the second liquid chamber 29 in which a portion of the wall surface is composed of a flexible cover 20. In the first liquid chamber 24, a valve member 42 having a portion penetrating the liquid chamber connection channel 25 and opening/closing the liquid chamber connection channel 25, and first urging means 23 that urges the valve member 42 toward the liquid chamber connection channel 25 are provided. Further, in the negative pressure adjustment unit 21, a load addition mechanism 41 is provided that can change a load added to the valve member 42 by adding a load to the valve member 42 to deviate the valve member 42 in an opposite direction to the liquid chamber connection channel 25 when the cover 20 moves toward the liquid chamber connection channel 25.</p> |
