DUAL STAGE SCANNER FOR ION BEAM CONTROL

摘要

An ion beam scanner includes a first scanner stage having a first opening to transmit an ion beam, the first scanner stage to generate, responsive to a first oscillating deflection signal, a first oscillating deflecting field within the first opening; a second scanner stage disposed downstream of the first scanner stage and having a second opening to transmit the ion beam, the second scanner stage to generate, responsive to a second oscillating deflection signal, a second oscillating deflecting field within the second opening that is opposite in direction to the first oscillating deflecting field, and a scan controller to synchronize the first oscillating deflection signal and second oscillating deflection signal to generate a plurality of ion trajectories when the scanned ion beam exits the second stage that define a common focal point.

主权项

1. An ion beam scanner, comprising:
a first scanner stage having a first opening to transmit an ion beam in a ribbon beam mode and in a spot beam mode, wherein in the spot beam mode the first scanner stage is configured to generate, responsive to a first oscillating deflection signal, a first oscillating deflecting field within the first opening; a second scanner stage disposed downstream of the first scanner stage and having a second opening to transmit the ion beam in the ribbon beam mode and in the spot beam mode, wherein in the spot beam mode the second scanner stage is configured to generate, responsive to a second oscillating deflection signal, a second oscillating deflecting field within the second opening that is opposite in direction to the first oscillating deflecting field; and a scan controller to synchronize the first oscillating deflection signal and second oscillating deflection signal to generate a plurality of ion trajectories when the scanned ion beam exits the second stage that define a common focal point, and wherein, in the ribbon beam mode the first scanner stage and second scanner stage are configured to transmit a ribbon beam unperturbed, wherein the ribbon beam fans out within the first scanner stage and second scanner stage.