摘要 |
PROBLEM TO BE SOLVED: To provide a small and high-accuracy distance measuring apparatus.SOLUTION: A distance measuring apparatus 1 using a laser beam comprises: a laser source 2; a first optical element 3 for converting a laser beam R1 emitted by the laser source 2 into parallel light; an oscillating mirror 9; light deflection means 6 for scanning the laser beam on the surface of a measurement object 4; a variable-focal length lens 7 arranged between the first optical element 3 and the light deflection means 6, and for converging a scan laser beam R2 scanned by the light deflection means 6 on the surface of a measurement section 5; and a light amount detector 8 for detecting the maximum value of an amount of light of catoptric light reflected from the surface of the measurement section 5. |