ELECTROMECHANICAL CONVERSION ELEMENT AND ITS MANUFACTURING METHOD, LIQUID EJECTION HEAD HAVING ELECTROMECHANICAL CONVERSION ELEMENT, AND LIQUID EJECTION DEVICE HAVING LIQUID EJECTION HEAD

摘要

PROBLEM TO BE SOLVED: To provide an electromechanical conversion element that exhibits a required polarization state and is excellent in electric characteristic and durability.SOLUTION: An electromechanical conversion element comprises: a first electrode 403 that is a common electrode formed on a substrate; an electromechanical conversion film 404 formed on the first electrode; a second electrode 405 that is an individual electrode formed on the electromechanical conversion film; a first insulation protective film 406 provided on the first and second electrodes and having a plurality of contact holes; a third electrode 407 formed so as to conduct with the first electrode; a fourth electrode 408 formed so as to conduct with the second electrode; a second insulation protective film 409 having a common electrode pad 412 formed on the third electrode, and individual electrode pads 411 formed on the fourth electrode and arranged in a predetermined line; and a fifth electrode 410 formed so as to surround the vicinity of the individual electrode pads arranged at an end part in the predetermined line. The fifth electrode is formed on the first insulation protective film and conducts with the first electrode.