| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a semiconductor device including a highly reliable fuse at low costs.SOLUTION: A polysilicon resistor 1 comprises: high resistance conductors 2; a low resistance conductor 3 contacting an end part of one of the high resistance conductors 2; and a low resistance conductor 3 contacting an end part of the other of the high resistance conductors 2. In the high resistance conductors 2, the width w2-1 of a first part 21 that most actively reacts when a current flows through a polysilicon fuse is the narrowest. In the high resistance conductors 2, the width w2-2 of the second part 22 that is an interface with the low resistance conductors 3 is the widest. The width of the high resistance conductors 2 is gradually wider from the first part 21 toward the second part 22. Each of the high resistance conductors 2 has a planar shape in which a part having a trapezoidal planar shape (hereafter, referred to as a trapezoidal shaped part), which has the first part 21 as an upper bottom and the second part 22 as a lower bottom, is line-symmetrically arranged with the upper bottom as a symmetry axis so as to make the upper bottoms of trapezoidal shaped parts face each other.</p> |
