| 发明名称 |
RESIN DISPENSER FOR NANO-IMPRINT |
| 摘要 |
A resin dispenser for nano-imprinting includes a housing including a lower chamber in which a resin is filled, a slit defined in a lower part of the lower chamber and through which the resin is discharged, and an upper chamber in which a pressure-applying fluid is filled, and a membrane separating the lower and upper chambers from each other, and of which an edge is fixed on a middle part of the housing, where the fluid is configured to apply the pressure to the membrane and protrude the membrane toward the slit of the lower chamber. |
| 申请公布号 |
US2015108688(A1) |
申请公布日期 |
2015.04.23 |
| 申请号 |
US201414307753 |
申请日期 |
2014.06.18 |
| 申请人 |
Samsung Electronics Co., Ltd. ;Samsung Display Co., Ltd. |
发明人 |
SHIN Bong-su;KIM Dong-ouk;PARK Joon-young;LEE Sung-hoon;CHUNG Jae-seung;HAHM Suk-gyu;LEE Dae-young;JO Gug-rae |
| 分类号 |
B28B7/30;B41J2/14 |
主分类号 |
B28B7/30 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A resin dispenser for nano-imprinting, comprising:
a housing comprising:
a lower chamber in which a resin is filled;a slit defined in a lower part of the lower chamber and through which the resin is discharged; andan upper chamber in which a pressure-applying fluid is filled; and a membrane separating the lower and upper chambers from each other, and of which an edge is fixed on a middle part of the housing, wherein the fluid is configured to apply the pressure to the membrane and protrude the membrane toward the slit of the lower chamber. |
| 地址 |
Suwon-si KR |
