| 发明名称 |
COMPOSITION AND METHOD FOR FORMING A DIELECTRIC LAYER |
| 摘要 |
A porous layer is described. The porous layer comprises a solidified sol-gel inorganic material having a distribution of nanometric voids, wherein at least some of nanometric voids are at least partially coated internally by carbon or a hydrophobic substance containing carbon. |
| 申请公布号 |
US2015108618(A1) |
申请公布日期 |
2015.04.23 |
| 申请号 |
US201314398735 |
申请日期 |
2013.05.07 |
| 申请人 |
Ramot at Tel-Aviv University Ltd. ;Tower Semiconductor Ltd. |
发明人 |
Litsyn Simon;Rosenman Gil;Handelman Amir;Roizin Yakov |
| 分类号 |
H01L21/02;C08J9/26 |
主分类号 |
H01L21/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A porous layer, comprising a solidified sol-gel inorganic material having a distribution of nanometric voids, wherein at least some of nanometric voids are at least partially coated internally by carbon or a hydrophobic substance containing carbon. |
| 地址 |
Tel-Aviv IL |
