发明名称 SENSOR CAPABLE OF SENSING PRESSURE BY MEANS OF DEFORMATION OF A WRINKLED PIEZOELECTRIC LAYER
摘要 The invention relates to a sensor that is sensitive to pressure, including a substrate (1) that supports a piezoelectric layer (2) made of a piezoelectric material, characterized in that the piezoelectric layer (2) has surface waves in the form of wrinkles, onto which pressure is exerted when the sensor is used. The piezoelectric layer is sandwiched between two electrodes (3a, 4) in order to enable charges generated by the deformation of the piezoelectric layer to be collected.
申请公布号 WO2015055788(A1) 申请公布日期 2015.04.23
申请号 WO2014EP72266 申请日期 2014.10.16
申请人 COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIESALTERNATIVES 发明人 BENAISSA, LAMINE;MOULET, JEAN-SÉBASTIEN
分类号 H01L41/113;G01L1/16 主分类号 H01L41/113
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