发明名称 |
SENSOR CAPABLE OF SENSING PRESSURE BY MEANS OF DEFORMATION OF A WRINKLED PIEZOELECTRIC LAYER |
摘要 |
The invention relates to a sensor that is sensitive to pressure, including a substrate (1) that supports a piezoelectric layer (2) made of a piezoelectric material, characterized in that the piezoelectric layer (2) has surface waves in the form of wrinkles, onto which pressure is exerted when the sensor is used. The piezoelectric layer is sandwiched between two electrodes (3a, 4) in order to enable charges generated by the deformation of the piezoelectric layer to be collected. |
申请公布号 |
WO2015055788(A1) |
申请公布日期 |
2015.04.23 |
申请号 |
WO2014EP72266 |
申请日期 |
2014.10.16 |
申请人 |
COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIESALTERNATIVES |
发明人 |
BENAISSA, LAMINE;MOULET, JEAN-SÉBASTIEN |
分类号 |
H01L41/113;G01L1/16 |
主分类号 |
H01L41/113 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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