| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator that has a fine columnar structure film without pores in a lower electrode, and provides a good piezoelectric property.SOLUTION: There is provided a piezoelectric actuator 10 including a deposition diaphragm 13, a lower electrode 15 provided on the upper side of the deposition diaphragm 13, a piezoelectric thin film 16 provided on the lower electrode 15, and an upper electrode 17 provided on the piezoelectric thin film 16, where the lower electrode 15 has a platinum film 15a, and a titanium oxide film 15b formed on the platinum film 15a and provided between the platinum film 15a and the piezoelectric thin film 16.</p> |
