发明名称 SEMICONDUCTOR STRUCTURE INCLUDING A SEMICONDUCTOR-ON-INSULATOR REGION AND A BULK REGION, AND METHOD FOR THE FORMATION THEREOF
摘要 A structure comprises a semiconductor substrate, a semiconductor-on-insulator region and a bulk region. The semiconductor-on-insulator region comprises a first semiconductor region, a dielectric layer provided between the semiconductor substrate and the first semiconductor region, and a first transistor comprising an active region provided in the first semiconductor region. The dielectric layer provides electrical isolation between the first semiconductor region and the semiconductor substrate. The bulk region comprises a second semiconductor region provided directly on the semiconductor substrate.
申请公布号 US2015111349(A1) 申请公布日期 2015.04.23
申请号 US201414579255 申请日期 2014.12.22
申请人 GLOBALFOUNDRIES Inc. 发明人 Flachowsky Stefan;Kessler Matthias;Hoentschel Jan
分类号 H01L21/84;H01L21/8234 主分类号 H01L21/84
代理机构 代理人
主权项
地址 Grand Cayman KY