NOVEL FLUORENE OXIME ESTER COMPOUND, PHOTOPOLYMERIZATION INITIATOR AND PHOTORESIST COMPOSITION CONTAINING THE SAME

摘要

Provided are a novel fluorene oxime ester compound, and a photopolymerization initiator and a photoresist composition containing the same.

主权项

1. A fluorene oxime ester compound represented by the following Chemical Formula 1: where, R1 to R3 each are independently hydrogen, halogen, (C1-C20)alkyl, (C6-C20) aryl, (C1-C20)alkoxy, (C6-C20) aryl(C1-C20)alkyl, hydroxy (C1-C20)alkyl, hydroxy (C1-C20)alkoxy (C1-C20)alkyl, or (C3-C20)cycloalkyl; and A is hydrogen, (C1-C20)alkyl, (C6-C20) aryl, (C1-C20)alkoxy, (C6-C20) aryl(C1-C20)alkyl, hydroxy (C1-C20)alkyl, hydroxy (C1-C20)alkoxy(C1-C20)alkyl, (C3-C10)cycloalkyl, amino, nitro, cyano, or hydroxyl.