VIBRATOR, MANUFACTURING METHOD OF VIBRATOR, ELECTRONIC DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT

摘要

A vibrator includes a base, a lid, and a functional element that is stored in a cavity formed by the base and the lid, in which the lid is provided with a sealing hole that penetrates through the lid and a sealing member that air-tightly seals the sealing hole, and in which the functional element includes a diffusion object shielding portion having a region of an accommodation opening which overlaps at least part of a region of a first opening of the sealing hole on a surface of the lid on the cavity side in a plan view of the functional element and the lid.

主权项

1. A vibrator comprising:
a base; a lid; and a functional element that is stored in a cavity formed by the base and the lid, wherein a sealing hole is formed at the lid, wherein a sealing member is disposed in the sealing hole, wherein the sealing hole includes a first opening on the cavity side, wherein the functional element includes a diffusion object shielding portion provided with an accommodation opening, and wherein the first opening overlaps the accommodate opening in at least part thereof in a plan view.