METHOD FOR PROCESSING SILICON SUBSTRATE

摘要

A method for processing a silicon substrate, comprising the steps of providing a silicon substrate having a first surface and a second surface, forming a non-penetrated hole extending from the first surface toward the second surface side in the silicon substrate, sticking a sealing tape comprising a support member and an adhesive layer on the first surface and filling at least part of the non-penetrated hole with the adhesive layer, performing reactive ion etching from the second surface toward the first surface side to allow the reactive ion etching to reach the adhesive layer filled in the non-penetrated hole and to expose the adhesive layer, and peeling the sealing tape from the silicon substrate to form a through hole in the silicon substrate.

主权项

1. A method for processing a silicon substrate to form a through hole in the silicon substrate, comprising the steps of:
providing a silicon substrate having a first surface and a second surface which is a surface opposite to the first surface; forming a non-penetrating hole extending from the first surface of the silicon substrate toward the second surface side in the silicon substrate; sticking a sealing tape comprising a support member and an adhesive layer on the first surface of the silicon substrate and filling at least part of the non-penetrated hole with the adhesive layer; performing reactive ion etching from the second surface of the silicon substrate toward the first surface side to allow the reactive ion etching to reach the adhesive layer filled in the non-penetrating hole and to expose the adhesive layer; and peeling the sealing tape from the silicon substrate to form the through hole in the silicon substrate.