Method to Remove Sapphire Substrate

摘要

A Light-Emitting Diode (LED) is formed on a sapphire substrate that is removed from the LED by grinding and then etching the sapphire substrate. The sapphire substrate is ground first to a first specified thickness using a single abrasive or multiple abrasives. The remaining sapphire substrate is removed by dry etching or wet etching.

主权项

1. A light-emitting diode (LED), comprising:
a substrate; a conductive layer disposed over the substrate; a first doped semiconductor layer disposed over the conductive layer, the first doped semiconductor layer having a first type of conductivity; an active layer disposed over the first doped semiconductor layer; a second doped semiconductor layer disposed over the active layer, the second doped semiconductor layer having a second type of conductivity different from the first type; an undoped buffer layer disposed over the second doped semiconductor layer, wherein the undoped buffer layer includes an opening that exposes a roughened surface of the second doped semiconductor layer; and a plurality of conductive elements disposed within the opening and over the second doped semiconductor layer.