发明名称 RESISTANCE CHANGE ELEMENT AND METHOD FOR MANUFACTURING SAME
摘要 According to one embodiment, a resistance change element includes: a first electrode; a second electrode; and a resistance change film provided between the first electrode and the second electrode, and the resistance change film including: a first transition metal oxide-containing layer; a second transition metal oxide-containing layer; and an intermediate layer provided between the first transition metal oxide-containing layer and the second transition metal oxide-containing layer, the intermediate layer having a higher crystallization temperature than the first transition metal oxide-containing layer and the second transition metal oxide-containing layer, and the intermediate layer including an amorphous material.
申请公布号 US2015108420(A1) 申请公布日期 2015.04.23
申请号 US201414188892 申请日期 2014.02.25
申请人 Kabushiki Kaisha Toshiba 发明人 ODE Hiroyuki;YAMAGUCHI Takeshi;YAMATO Masaki;KOBAYASHI Shigeki;NAKAKUBO Yoshinori
分类号 H01L45/00 主分类号 H01L45/00
代理机构 代理人
主权项 1. A resistance change element comprising: a first electrode; a second electrode; and a resistance change film provided between the first electrode and the second electrode, and the resistance change film including: a first transition metal oxide-containing layer;a second transition metal oxide-containing layer; andan intermediate layer provided between the first transition metal oxide-containing layer and the second transition metal oxide-containing layer, the intermediate layer having a higher crystallization temperature than the first transition metal oxide-containing layer and the second transition metal oxide-containing layer, and the intermediate layer including an amorphous material.
地址 Tokyo JP