ARRANGEMENT AND METHOD FOR COOLING A PLASMA-BASED RADIATION SOURCE

摘要

An arrangements and methods for cooling a plasma-based radiation source having a revolving element which is to be cooled, particularly for application in EUV radiation sources, is disclosed. The revolving element is immersed in the metal coolant in a first vessel of a primary cooling circuit, and a secondary cooling circuit with a cooling liquid evaporating at the desired operating temperature of the metal coolant has a control unit for controlling at least one atomizing arrangement in a differentiated manner and for selectively controlling a heater in case the determined temperature falls below a minimum operating temperature of the metal coolant. The at least one atomizing arrangement in a cooling section selectively sprays individual wall regions of the first vessel with the cooling liquid depending on the determined temperature of the metal coolant.

主权项

1. An arrangement for cooling a plasma-based radiation source having a revolving element, the arrangement comprising:
a primary cooling circuit comprising a first vessel for holding a metal coolant in which the revolving element is at least partially immersed; means for circulating the metal coolant in the first vessel; means for maintaining a temperature of the metal coolant to a predetermined operating temperature above a melting point of the metal coolant; a secondary cooling circuit comprising:
a cooling liquid that evaporates at the operating temperature of the metal coolant;a second vessel enclosing at least one cooling section of the first vessel;at least one atomizing arrangement for the cooling liquid to spray defined wall regions of the at least one cooling section with the cooling liquid depending on a temperature determined for the metal coolant;a cooling unit for sucking evaporated cooling liquid out of the second vessel, for condensing and for returning the cooling liquid under pressure to the at least one atomizing arrangement; anda control unit for controlling the means for maintaining the temperature of the metal coolant, the control unit being configured for differentiated cooling by controlling the at least one atomizing arrangement depending on the predetermined temperature of the metal coolant and for selectively heating the metal coolant by controlling a heater when the determined temperature falls below a minimum operating temperature of the metal coolant.