| 摘要 |
<p>The invention relates to an organic matter evaporation system which was developed to solve problems in production which occur in the course of producing OLED, evaporating a number of organic matters having patterns, and maintaining an organic matter evaporation processing chamber or replacing evaporation sources. The system includes: trans chambers which are separated at a certain distance and extend horizontally, in which a first robot arm is installed on the inside to move substrates; a transport chamber (2) having a first gate at both ends to connect the neighboring trans chambers; a processing chamber placed in the form of diamond between the neighboring trans chambers in which a second gate is installed at both ends with one side installed at both sides of the first gate and then obliquely extends to separate from each other from the neighboring trans chambers; and a source chamber equipped with a second robot arm which is installed where two processing chambers meet, connects to the second gate, having an evaporation source installed inside to be placed selectively into one of two processing chambers to perform evaporation process. The trans chamber located in the end on a side has a loading gate into which substrates enter, while the other trans chamber installed in the end on the other side has a discharge gate to eject the substrates.</p> |
