| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a grinding device capable of washing away abrasive grains dropped from or stuck in a grinding wheel by increasing the flowability of grinding water supplied to a grinding part using a grinding wheel. <P>SOLUTION: The grinding device includes: a chuck table for holding a workpiece; a grinding means for grinding the workpiece held by the chuck table; and a grinding water supply portion for supplying grinding water to the grinding part as the grinding means. The grinding means includes: a spindle housing; a rotary spindle rotatably supported by the spindle housing; a wheel mount installed at one end of the rotary spindle; and the grinding wheel comprising a wheel base installed to the wheel mount and a ring-like grinder attached to the lower surface outer periphery of the wheel base. Further, the grinding device is provided with an ultrasonic vibration applying mechanism for applying ultrasonic vibration to the grinding water supplied to the grinding part as the grinding means. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
