Nano-imprint mold

摘要

Disclosed is a mold comprising a fine-structure layer including a plurality of dots comprised of a plurality of convex portions or concave portions extending in the direction of from a main surface of a substrate to outside the surface,
wherein the fine-structure layer forms dot lines such that the plurality of dots is arranged with a pitch Py of nano-order of a constant interval in a first direction in the main surface of the substrate, the dot lines are provided parallel with a pitch Px of nano-order of a constant interval in a second direction orthogonal to the first direction, and
the shift amount ±1 in the first direction between adjacent first dot line and second dot line is different from the shift amount ±2 in the first direction between the second dot line and a third dot line adjacent to the second dot line.