| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a mold for imprinting, an alignment method, an imprinting method, and an imprinting device capable of performing alignment with high accuracy by making it possible to directly and optically recognize an alignment mark made of the same material as a mold material without requiring a complicated process for manufacturing the mold. <P>SOLUTION: In step and repeat type imprinting, an alignment mark on the mold side is formed at a position parted from a groove structure on the same plane as the transcription region of the mold, and is not aligned with the substrate side alignment mark in a transcribed region where imprinting is performed, but is aligned with the transcribed region vertically, horizontally, and diagonally brought into contact with the transcribed region. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
