发明名称 Method for manufacturing array-type antenna-coupled detector
摘要 <p>Disclosed is a method for manufacturing an array-type optical detector, which is capable of reducing optical crosstalk. The method for manufacturing the array-type optical detector comprises the steps of: preparing a doped substrate; growing a non-conductive layer on one surface of the doped substrate; growing an optical-detector-array manufacturing layer on the non-conductive layer; etching the optical-detector-array manufacturing layer to manufacture the optical detector, the etching being performed on a portion of the non-conductive layer; forming an etching mask on the other surface of the doped substrate; and forming an aperture array functioning as a horn antenna on the other surface of the doped substrate by etching the other surface of the doped substrate through the etching mask.</p>
申请公布号 KR20150043064(A) 申请公布日期 2015.04.22
申请号 KR20130122052 申请日期 2013.10.14
申请人 发明人
分类号 H01L31/09 主分类号 H01L31/09
代理机构 代理人
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