发明名称 ダイシングテープ一体型ウエハ裏面保護フィルム
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a dicing tape integrated type wafer rear surface protection film which is used from a dicing step of a semiconductor wafer through a flip chip bonding step of a semiconductor chip. <P>SOLUTION: A manufacturing method of a semiconductor device using a dicing tape integrated type wafer rear surface protection film having a dicing tape and a wafer rear surface protection film includes the steps of: bonding a work piece on the wafer rear surface protection film which is colored; dicing the work piece to form chip like work pieces; peeling the chip like work pieces from an adhesive layer of the dicing tape with the wafer rear surface protection film; and fixing the chip like work piece to an adherend by a flip chip bonding method. <P>COPYRIGHT: (C)2013,JPO&INPIT</p>
申请公布号 JP5705353(B2) 申请公布日期 2015.04.22
申请号 JP20140096561 申请日期 2014.05.08
申请人 发明人
分类号 H01L21/301;H01L21/60;H01L23/00 主分类号 H01L21/301
代理机构 代理人
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