| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a liquid quantitative discharge device in which variation in a coating liquid is small in a liquid coating step of an electronic component manufacturing. <P>SOLUTION: A liquid quantitative discharge device comprises: a driving mechanism which drives a processed substrate on which a plurality of recesses are formed on an X and Y axes; position detection and storage means for detecting and storing each XY coordinate value of the recess; liquid quantitative discharge means for discharging a prescribed amount of the liquid on the recess position; and control means for controlling the driving mechanism to move the recess to the XY coordinate position and the liquid quantitative discharge means to discharge the prescribed amount of the liquid to the recess. This discharge device further comprises displacement detection means for detecting an absolute value H of height of a prescribed region inside the recess and/or a relative value h of height of the prescribed region of each of the recesses for all the recesses. <P>COPYRIGHT: (C)2013,JPO&INPIT |
