| 摘要 |
<p>The invention relates to a particle beam device and to a method for operation of a particle beam device. The particle beam deivce has a sample chamber, a sample (16) which is arranged in the sample chamber, a first particle beam column (2), a second particle beam column and at least one detector (34), which is arranged in a first cavity (35, 38) in a first hollow body (36, 37), wherein the first cavity (35, 38) has a first inlet opening (39, 40). The first particle beam column (2) and the second particle beam column are arranged on one plane, while in contrast the detector (34) is not arranged on that plane. At least one control electrode (41) is arranged on the first particle beam column (2). Furthermore, the second particle beam column has a terminating electrode. A first hollow body voltage, a control electrode voltage and/or a terminating electrode voltage are/is chosen such that first interaction particles and/or second interaction particles enter the first cavity (35, 38) in the first hollow body (36, 37) through the first inlet opening (39, 40).</p> |
