发明名称 Variable-capacitor comprising a mobile comb intermeshed with a fixed comb, accelerometer and rate gyro comprising such a capacitor
摘要 <p>The capacitor has a movable chaser (16) and a fixed chaser (14). Each chaser has a body, and teeth (50, 52) with ends fixed to the body and free ends, where the teeth of the fixed chaser and the movable chaser are interdigital. The teeth of the movable chaser exhibit geometric differences between them in a manner to attenuate resonance modes of the movable chaser. The free ends of the teeth of the movable chaser form a V-shaped arrangement.</p>
申请公布号 EP2071598(B1) 申请公布日期 2015.04.22
申请号 EP20080305878 申请日期 2008.12.03
申请人 MEMSCAP 发明人 WENK, BÉATRICE
分类号 H01G5/16 主分类号 H01G5/16
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