发明名称 Method for reducing adhesion forces between an imprinting material and a mold, and use of an imprinting composition
摘要 <p>A method and composition features improved wetting characteristics while allowing preferential adhesion and release characteristics with respect to a substrate and a mold having imprinting material disposed therebetween. The method includes coating a surface of the mold with a volume of surfactant containing solution. The surfactant in the solution includes a hydrophobic component consisting essentially of a plurality of fluorine-containing molecules. The compositions feature improved preferential adhesion and release characteristics with respect to a substrate and a mold having imprinting material disposed therebetween. The compositions facilitate bifurcation of the imprinting material into a surfactant-component-rich sub-portion and a surfactant-component-depleted sub-portion located between said surfactant-component-rich sub-portion and said substrate. A method is also disclosed that takes advantage of the characteristics of the composition.</p>
申请公布号 EP1838424(B8) 申请公布日期 2015.04.22
申请号 EP20050820878 申请日期 2005.11.14
申请人 CANON NANOTECHNOLOGIES, INC. 发明人 XU, FRANK, Y.;FLETCHER, EDWARD, B.;TRUSKETT, VAN, N.;MILLER, MICHAEL, N.
分类号 G03F7/00;B29C33/58;B29C33/62;B82Y10/00 主分类号 G03F7/00
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