Method for reducing adhesion forces between an imprinting material and a mold, and use of an imprinting composition
摘要
<p>A method and composition features improved wetting characteristics while allowing preferential adhesion and release characteristics with respect to a substrate and a mold having imprinting material disposed therebetween. The method includes coating a surface of the mold with a volume of surfactant containing solution. The surfactant in the solution includes a hydrophobic component consisting essentially of a plurality of fluorine-containing molecules. The compositions feature improved preferential adhesion and release characteristics with respect to a substrate and a mold having imprinting material disposed therebetween. The compositions facilitate bifurcation of the imprinting material into a surfactant-component-rich sub-portion and a surfactant-component-depleted sub-portion located between said surfactant-component-rich sub-portion and said substrate. A method is also disclosed that takes advantage of the characteristics of the composition.</p>
申请公布号
EP1838424(B8)
申请公布日期
2015.04.22
申请号
EP20050820878
申请日期
2005.11.14
申请人
CANON NANOTECHNOLOGIES, INC.
发明人
XU, FRANK, Y.;FLETCHER, EDWARD, B.;TRUSKETT, VAN, N.;MILLER, MICHAEL, N.