| 发明名称 |
METHODS AND APPARATUS PROVIDING THERMAL ISOLATION OF PHOTONIC DEVICES |
| 摘要 |
Described embodiments include photonic integrated circuits and systems with photonic devices, including thermal isolation regions for the photonic devices. Methods of fabricating such circuits and systems are also described. |
| 申请公布号 |
EP2862014(A1) |
申请公布日期 |
2015.04.22 |
| 申请号 |
EP20130733154 |
申请日期 |
2013.06.12 |
| 申请人 |
MICRON TECHNOLOGY, INC. |
发明人 |
MEADE, ROY;SANDHU, GURTEJ |
| 分类号 |
H01L33/64;G02B6/12;G02F1/01;G02F1/313 |
主分类号 |
H01L33/64 |
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