| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a high speed heat treatment method and a heat treat furnace capable of rapidly baking an electrode paste that is applied on a semiconductor substrate, to perform sintering. <P>SOLUTION: In a fifth heating area H5 where a maximum temperature is formed, a heat radiator 36 that performs heat radiation by heating of heating heaters 33a and 33b is provided between a semiconductor substrate 38 for a solar battery cell that is transported and the upper heating heater 33a. As a result, the semiconductor substrate 38 for a solar battery cell is heated by heat radiation close to the heat radiator, which allows high speed transportation of the semiconductor substrate 38 for the solar battery cell. The semiconductor substrate 38 itself can be suppressed from being raised in temperature while the surface is evenly being heated. Therefore, while a solar battery cell 40 keeps a sufficient conversion efficiency, a baking temperature can be significantly lowered which is set to be higher than the temperature at which Ag in the conductive paste for a surface electrode fires-through as well as the temperature at which Al in the conductive paste for a rear surface electrode is made to be an alloy. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
