| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a fluorescent X-ray detector and a fluorescent X-ray detection method capable of improving the spatial resolution of fluorescent X-ray analysis without reducing the concentration spot of an X-ray lens. <P>SOLUTION: For the fluorescent X-ray detector, the position of the focus of a first X-ray lens 12 for concentrating primary X-rays from an X-ray tube (X-ray source) 11 to the concentration spot (first space) and the position of the focus of a second X-ray lens 22 for condensing fluorescent X-rays from a fetch spot (second space) to be detected by an X-ray detector (detection means) 21 are separated within such a range that the concentration spot and the fetch spot overlap. Only the fluorescent X-rays from a detection region where the concentration spot and the fetch spot overlap are detected, and the size of the detection region is the spatial resolution. Compared to a conventional fluorescent X-ray detector for which the size of the concentration spot is the spatial resolution, the spatial resolution of the fluorescent X-ray analysis is improved. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
