High performance diode laser and method of producing the same

摘要

The diode laser has facets arranged opposite together, where the facets are made of amorphous layer systems (26, 28) composed of silicon and carbon. The amorphous layer systems perform a function of a passivation layer (22) and a function of reflection-determining functional layers (24). The amorphous layer systems are deposited by a plasma enhanced chemical vapor deposition process or a thermal chemical vapor deposition process using process gases such as methane and silane. The passivation layer acts as a diffusion barrier. An independent claim is also included for a method of producing a high-power diode laser.