发明名称 WAFER LEVEL SPECTROMETER
摘要 <p>A sensor apparatus has a substrate and a spectrally selective detection system, and a cover. The spectrally sensitive detection system is sandwiched between the substrate and the cover. The spectrally selective detection system includes a generally laminar array of wavelength selectors optically coupled to a corresponding array of optical detectors located within the substrate. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.</p>
申请公布号 EP2721381(A4) 申请公布日期 2015.04.22
申请号 EP20120800456 申请日期 2012.06.12
申请人 KLA-TENCOR CORPORATION 发明人 JENSEN, EARL;SUN, MEI;O'BRIEN, KEVIN
分类号 G01J3/02;G02B6/122 主分类号 G01J3/02
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