| 摘要 |
The present invention relates to a hard coating film formed into a multi-layered nanostructure adjacent to a hard base material such as a hard metal, and obtaining improved oxidation resistance and wear resistance. According to the present invention, the hard coating film includes a structure on which a first layer and a second layer are alternately stacked on the each other at least two times. The first layer is formed of TiAl nitride of Ti_1-aAl_a (0.3<=a<=0.7). The second layer is formed into a multi-layered nanostructure including a thin plate A, a thin plate B, a thin plate C, and a thin plate D of which the thickness is 3-20 nm; or a structure where the multi-layered nanostructures are repeated at least two times. The thin plate A is formed of AlTiSi nitride of Al_1-b-cTi_bSi_c (0.3<=b<=0.7, 0<=c<=0.1). The thin plate B and D are formed of TiAl nitride of Ti_1-dAl_d (0.3<=d<=0.7). The thin plate C is formed of AlCr nitride of Al_1-eCr_e (0.3<=e<=0.7). The amount of AL contained in the thin plate A and B are different. The amount of nitrogen contained in the first layer is larger than that of the second layer. |
