Method of manufacturing an organic light-emitting display apparatus using at least two deposition units

摘要

An organic layer deposition apparatus, a method of manufacturing the same, and an organic light-emitting display apparatus using the same, and an organic light-emitting display apparatus manufactured using the method, are disclosed. An organic layer deposition apparatus is suitable for mass production of organic light-emitting display apparatuses on large-size substrates, and enables high-precision patterning. A method of manufacturing an organic light-emitting display apparatus by using the organic layer deposition apparatus, and an organic light-emitting display apparatus manufactured using the method, are disclosed.

主权项

1. A method of manufacturing an organic light-emitting display apparatus by using an organic layer deposition apparatus for forming an organic layer on a substrate, the method comprising:
fixing the substrate to a transfer unit in a loading unit; transferring the transfer unit to which the substrate is fixed into a chamber by using a first conveyer unit configured to pass through the chamber in a first direction; forming the organic layer by depositing a deposition material discharged from an organic layer deposition assembly onto the substrate while relatively moving the substrate with respect to the organic layer deposition assembly in such a way that the organic layer deposition assembly disposed inside the chamber is spaced from the substrate at an interval; separating the substrate on which deposition has been completed in an unloading unit from the transfer unit; and transferring the transfer unit separated from the substrate to the loading unit by using a second conveyer unit arranged to pass through the chamber in a second direction opposite to the first direction, wherein the organic layer deposition assembly comprises a first organic layer deposition unit and a second organic layer deposition unit, wherein the first organic layer deposition unit is arranged in such a way that a longitudinal direction of the first organic layer deposition unit is parallel to a longitudinal direction of the second organic layer deposition unit, wherein each of the first and second organic layer deposition units comprises:
a deposition source for discharging a deposition material;a deposition source nozzle unit that is at one side of the deposition source and at which one or more deposition source nozzles are formed;a patterning slit sheet that is opposite to the deposition source nozzle unit and in which one or more patterning slits are formed; andfirst and second sensors that are at two ends of the deposition source in a longitudinal direction of the deposition source to face each other and measure an amount of vaporization of the deposition material, wherein the deposition material discharged from the deposition source passes through the patterning slit sheet and is deposited onto the substrate to form a pattern.